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Reticle/Mask Foreign body inspection device
(PD Xpadion)
PD Xpadion is the latest generation of HORIBA foreign body detection products.
PD Xpadion is the latest generation of the HORIBA Particle Inspection product line. Based on an innovative modular platform design, PD Xpadion is the right tool to meet current and future needs of Mask & Pellicle inspection in the lithography and mask production processes. Fab automation, combined with a suite of HORIBA’s core technology, allow users to expand the PD Xpadion system to include not only particle inspection and detection, but also particle characterization by Raman analysis, pellicle film thickness and uniformity, and pellicle health monitoring tools.
• False Detection Reduction Function
• Ability to re-analyze inspection data (without re-inspection) for faster inspection
recipe optimization
• Innovative software with improved usability
• OHT, EFEM, Multi-port, Multi-slot adaptation
• Integration options with other HORIBA technologies such as Raman spectroscopy
and Ellipsometry
Automatic foreign body removal device(RP-1)
Automatic removal of foreign substances by blow and vacuum suction
The RP-1 automatically removes particles from the reticle/mask by air (or N2) and vacuum suction.
Routinely removing the particles before the lithography process extends the replacement cycle of the pellicle and cleaning cycle of the mask, thereby contributing to a reduction in running costs.
If you want to pruchase and have any questions please feel free to contact +82-31-781-0033 or email.