High-precision concentration monitoring of individual
components in mixed chemical solutions The CS-700 Series chemical concentration monitor provides high-precision measurement
of individual component concentrations in mixed chemical solutions used in semiconductor manufacturing processes.
By enhancing HORIBA’s proprietary optical system, the CS-700 Series achieves approximately
five times higher measurement accuracy for component concentrations in mixed acids
compared to conventional models.
This contributes to enhanced quality control and improved precision in chemical
management within semiconductor manufacturing processes.
• Optimized for measuring complex mixed acid solutions
  (for BEOL process chemicals)

• Approximately fivefold improvement in measurement accuracy compared to
  conventional models

• Real-time, high-precision measurement of up to eight components

• Retains the core functions and structural design of the CS-100 Series