Scrubbing Roller
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AION PVA BRUSH
Excellent performance in particle removal
The AION Roller Brush has protuberances with superfine pores of circa 150㎛ on their suface and with their suppleness and softness peculiar to PVA sponge, efficiently removes particles without dam-aging the scubbed surfaces.
PVA Roller Brush Application
- Cleaning process after polishing process of semiconductor CMP equipment (Post-CMP)
- Photo Mask Cleaning Process
- LCD substrate cleaning process
- Hard Disk Cleaning Process
Specification
| No. | Outer dia. | Outer dia.(body) | Inner dia. | Length |
|---|---|---|---|---|
| 1 | 32mm | 25mm | 12mm | 250mm |
| 2 | 38mm | 31mm | 18mm | 350mm |
| 3 | 48mm | 40mm | 26mm | 350mm |
| 4 | 60mm | 51mm | 32mm | 350mm |
| 5 | 70mm | 60mm | 32mm | 350mm |
| 6 | 76mm | 67mm | 26mm | 500mm |
| 7 | 89mm | 77mm | 26mm | 500mm |
| 8 | 106mm | 94mm | 60mm | 500mm |
* The length in the above specifications refers to the maximum length of the standard specification product.
Applications
| - BS-402-1 (AMAT LK 300mm) |
| - BS-102-1 (EBARA F*REX 300mm) |
| - BS-352-0 (On-Track 200mm) |
| - BS-401-0 (AMAT 200mm) |
| - BS-101-0, CS003 (EBARA 200mm) |
| - FS-101-0 (Auriga-EC 200mm) |
| - CS-001/002 (IPEC-776) |
If you want to pruchase and have any questions please feel free to contact +82-31-781-0033 or email.
E-Mail : jsoh@ktsemi.co.kr