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Electrode insertion type Challenge rate meter
(HE-480C-GC)
By applying a special carbon electrode with excellent pressure resistance and chemical resistance,
the system enables conductivity measurement of various chemical solutions without metal contamination.
It can be widely applied to concentration control in semiconductor cleaning processes,
chemical dilution management, and DI water recycle monitoring.
• Optimized for chemical measurement in semiconductor wet processes and DI water
recovery processes
• Equipped with temperature measurement and simultaneous display function
• Simultaneous display of measured values and parameter settings
• Comprehensive temperature compensation functions
• Intuitive icon-based display with security functions
• CE marking compliant
| Measurement range | 2-electrode method | |
|---|---|---|
| Temperature sensor specifications | Platinum resistance thermometer Pt1000 (at 0 °C), Temperature coefficient 3850 ppm/°C (standard) | |
| Measurement range | Cell integer | 0.1/cm(ESH-01series) |
| Measurement range | µS/cm : 20.00/200.0 | mS/m : 2.000/20.00 | |
| temperature | 0~100℃(Selectable display of up to 2 decimal places) | |
| Repeatability | ±0.5% of Full Scale (±1.5% of Full Scale when displayed as TDS) | |
| linearity | ±0.5% of Full Scale (±1.5% of Full Scale when displayed as TDS) | |
Inline sensor type conductivity meter(HE-960HC)
This is an in-line type conductivity meter capable of high-precision, continuous measurement over a wide conductivity range for managing chemical concentration and dilution ratios used in semiconductor and LCD processes.
• Wide range capability for flexible application under various process conditions
• Automatic display range switching
• Comprehensive temperature compensation functions
• Built-in function for converting conductivity values to concentration
| Measurement method | 4-electrode carbon distribution type conductivity method |
|---|---|
| Measurement range | 0~1000mS/cm |
| thermometer | 0~100℃ |
| Repeatability | ±0.5% of Full Scale |
| linearity | ±0.5% of Full Scale |
TMAH dedicated concentration meter (HE-960H-TM-S)
A dedicated concentration meter designed for high-precision wt% measurement of TMAH solution concentration, the main component of photoresist developers used in semiconductor and LCD processes.
• High-precision concentration measurement down to a minimum resolution of 10 ppm
• Built-in compensation functions to minimize temperature effects
• Temperature measurement with simultaneous display
• Flexible allocation of analog outputs
| Measurement method | 4-electrode carbon distribution type conductivity method |
|---|---|
| Measurement range | TMAH 0~3wt% |
| temperature | 0~100℃ |
| Repeatability |
TMAH concentration: within ±0.003 wt% Conductivity: ±1.0% of Full Scale |
| linearity | TMAH concentration: within ±0.030 wt% Conductivity: ±1.0% of Full Scale |
If you want to pruchase and have any questions please feel free to contact +82-31-781-0033 or email.