본문
Resistivity meter (HE-480R)
Based on the temperature characteristics of DI water, the built-in microprocessor calculates temperature compensation factors and automatically converts measurements to resistivity at 25 °C.
It enables high-precision, continuous monitoring of DI water during process operation, and with accurate temperature compensation over a range of 0–100 °C, it is optimized for the strict DI water purity monitoring required in final wafer cleaning processes.
• Optimized for DI water resistivity monitoring in final rinse processes
• Comprehensive temperature compensation functions
• Simultaneous display of measured values and parameter settings
• Intuitive icon-based display with security functions
- CE marking compliant
| Measurement method | 2-electrode method | |
|---|---|---|
| Cell integer | 0.1/cm | |
| Temperature sensor specifications | Platinum resistance thermometer Pt1000 (at 0 °C), Temperature coefficient 3850 ppm/°C (standard) | |
| Measurement range |
Resistivity | 0–0.200 / 2.00 / 20.00 / 100.0 MΩ·cm (Equivalent units: 0–2.00 / 20.0 / 200.0 / 1000 kΩ·m) ※ Measurement at 100.0 MΩ·cm / 1000 kΩ·m is available without temperature compensation |
| temperature | 0~100℃ (can be displayed up to 2 decimal places) | |
| Repeatability | ±0.5% of Full Scale | |
| linearity | ±0.5% of Full Scale | |
Carbon Sensor Resistivity meter(HR-960R-GC)
This resistivity meter employs a glass carbon sensor that offers excellent chemical resistance
to cleaning solutions containing hydrofluoric acid (HF) and hydrogen peroxide (H₂O₂),
while preventing contamination caused by metal ion elution.
A special surface treatment of the carbon sensor minimizes particle release,
enabling reliable resistivity measurement even in rinse processes within one-bath cleaning systems.
This allows for high-quality process control throughout semiconductor cleaning processes.
• Excellent chemical resistance for high-quality control in one-bath cleaning processes
• Fast and stable high-speed response
• Comprehensive temperature compensation functions
• Intuitive icon-based status indication with security functions
• DC 24 V power supply
| Measurement method | 2-electrode method | |
|---|---|---|
| sensor input | 1 channel | |
| Cell integer | 0.1/cm | |
| Temperature sensor specifications | Platinum resistance thermometer Pt1000 (at 0 °C), Temperature coefficient 3850 ppm/°C (standard) | |
| Measurement range |
Resistivity | 0–0.200 / 2.00 / 20.00 / 100.0 MΩ·cm (Equivalent units: 0–2.00 / 20.0 / 200.0 / 1000 kΩ·m) ※ Measurement at 100.0 MΩ·cm / 1000 kΩ·m is available without temperature compensation. |
| temperature | 0~100℃ (can be displayed up to 2 decimal places) | |
| Repeatability | ±0.5% of Full Scale | |
| linearity | ±0.5% of Full Scale | |
If you want to pruchase and have any questions please feel free to contact +82-31-781-0033 or email.