Multi-Component & Trace-Level Chemical
Concentration Monitor

A high-precision concentration monitor for specialty blended chemicals used in semiconductor BEOL processes, combining three measurement technologies—NIR, conductivity, and pH—
to enable stable, real-time analysis of up to eight components, including trace-level components down to ppm levels.
By employing a non-titration measurement method that requires no reagents or electrodes,
the system offers simplified maintenance and is optimized for multi-line and multi-range measurement environments.,

• Measurement of up to eight components, including trace-level additives (ppm range)
  Enables precise analysis of complex BEOL chemical solutions containing multiple and trace
  components using a single system, significantly improving process control efficiency.
• Non-titration measurement method
  No reagent replacement is required, and minimal consumables are needed, resulting in simplified
  maintenance. (Automatic calibration supported; simple maintenance approximately once every
  six months.)
• Independent multi-line, multi-point, and multi-range support
  A single system can independently monitor two separate lines, with up to six configurable
 measurement ranges per line, allowing rapid switching between chemical types and flexible
 adaptation to various process requirements.
• Expandable capability for byproduct measurement
  Through calibration curve development, reaction byproducts can be incorporated into the
  analysis, enabling advanced concentration management that accounts for process variations.