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Dissolved Ozone Monitor (HZ-960)
A reagent-free solution that reduces operating costs while providing stable ozone water concentration control in semiconductor manufacturing environments with growing demands for environmentally friendly processes.
• Multiple piping size options available
In-line type sensors are available in 1", 3/4", and 1/2", allowing selection according to
application requirements and equipment configurations.
• Wide measurement range
Based on the standard 0–100 mg/L range, a total of five selectable measurement ranges are
provided,
enabling reliable concentration control from low to high concentration levels.
• High measurement accuracy
With zero stability within ±0.35%/week and repeatability within ±0.2% of Full Scale, stable
ozone water process control can be maintained.
• Remote output and support for multiple output interfaces
• Intuitive icon-based display for easy instrument status monitoring
• Security functions to prevent misoperation and measurement errors
• CE marking compliant
| Measurement method | UV absorption method (254 mm) |
|---|---|
| Measurement range | ZH-10 : O3 0~10ppm |
| ZH-40 : O3 0~40ppm | |
| ZH-100 : O3 0~100ppm | |
| ZH-200 : O3 0~200ppm | |
| ZH-500 : O3 0~500ppm | |
| Repeatability | Within ±0.2% of full scale |
| linearity | Within ±1.0% of full scale |
If you want to pruchase and have any questions please feel free to contact +82-31-781-0033 or email.

