400mm Ring Frame Wafer Stocker > Wafer Stocker | KOREA TECHNO/ KOREA TECHWIN CO., LTD. 400mm Ring Frame Wafer Stocker > Wafer Stocker | KOREA TECHNO/ KOREA TECHWIN CO., LTD.

KOREA TECHNO/ KOREA TECHWIN CO., LTD.
  • PRODUCT
  • Wafer Stocker
    • PRODUCT

    KOREA TECHNO/ KOREA TECHWIN CO.,

    Wafer Stocker

    400mm Ring Frame Wafer Stocker

    본문

    Model

    KTRST-3000


    400mm Ring Wafer Stocker System This equipment automatically minimizes particle contamination by utilizing a localized purification system for 400mm Ring Frames with 300mm Wafers mounted, and performs the storage and automatic Loading/Unloading transport of Ring Frame Wafers according to the operator's selected process.

    Specification
    Wafer SizeRing Frame for 300mm
    Load Port4 Q’ty (Hybrid)
    Wafer Stock3,000wfs
    Mini-EnvironmentFFU(ULPA), Ionizer
    Through put90wfs/h
    CommunicationSECS/GEM
    FAB AutomationOHT
    Etc

    If you want to pruchase and have any questions please feel free to contact +82-31-781-0033 or email.

    E-Mail : smlee@ktsemi.co.kr