300mm EFEM System
본문
Model
KTEF-3002A
Equipment that automatically performs wafer
loading/unloading transport
This equipment minimizes particle contamination by applying a localized purification system to 300mm Wafers, and automatically performs the Loading/Unloading transfer of Wafers according to the operator's selection and suitable for the process.
Specification
| Wafer Size | 8”(200mm), 12”(300mm) |
|---|---|
| Dimension | 1,720(W) x 1,447(D) x 1,880(H)mm |
| Weight | Less than 700 kg |
| SEMI Standard Compliance | |
| Loading Port height | 900mm |
| Cleanliness | Class 1 @ 0.1um |
| Serial RS-232C, Parallel I/O communication | |
| BCR or RFID System(Optional) | |
If you want to pruchase and have any questions please feel free to contact +82-31-781-0033 or email.
E-Mail : smlee@ktsemi.co.kr