Inspection EFEM System
본문
Model
KTES-3001A
INSPECTION & EFEM Integrated equipment The EFEM & Vision Integrated System minimizes particle contamination that can occur during the Wafer transfer/exposure process for Inspection, and offers the benefits of efficient equipment operation, reduced footprint, and cost reduction through integration.
Specification
| - Provides of various load ports |
| - Provides of Vision(Inspection) Table / Space |
| - System Controller Integration possible |
| - User customized design possible |
| - Improved productivity |
If you want to pruchase and have any questions please feel free to contact +82-31-781-0033 or email.
E-Mail : smlee@ktsemi.co.kr