Bulk Etching System
본문
Model
KTBES-2300
Wafer Bulk Etching Scan Equipment
This equipment supports compositional analysis of wafers by manually performing localized etching and scanning on the target wafer.
It is designed to accommodate wafer sizes of 6", 8", and 12".
사양
| Applications | Bulk etching |
|---|---|
| Etching Degree | Time Etching or EPD (Option) |
| Thickness Range | 0.5um ~ 100um |
| N₂ Control | Syringe Pump 5mL 3-Port valve (Accuracy : < 1.0%) |
| Sample Capability | 25 Sample Holder X 4 Block = 100 samples (User Option) |
If you want to pruchase and have any questions please feel free to contact +82-31-781-0033 or email.
E-Mail : smlee@ktsemi.co.kr